Investigation of Air Damping and Q in a Mems Resonant Mass Sensor
نویسندگان
چکیده
INTRODUCTION For a resonant mass sensor, one definition of sensitivity is the ratio of resonant frequency change to mass change. This is not the complete story, however, as the change in resonant frequency needs to be detectable. Thus, the resonator’s Q factor (which is inversely related to damping ratio) is an important characteristic of the resonator. A low Q factor corresponds to a broad resonance peak whose exact peak frequency is more uncertain.
منابع مشابه
Design of Novel High Sensitive MEMS Capacitive Fingerprint Sensor
In this paper a new design of MEMS capacitive fingerprint sensors is presented. The capacitive sensor is made of two parallel plates with air gap. In these sensors, the capacitance changes is very important factor. It is caused by deformation of the upper electrode of sensor. In this study with making slots in upper electrode, using T-shaped protrusion on diaphragm in order to concentrate the f...
متن کاملModelling and Simulation of the Effect of Air Damping on the Frequency and Quality factor of a CMOS-MEMS Resonator
This paper reports analytical modeling and finite element analysis (FEA) of the effect of two types of air damping (squeeze film and slide film damping) on resonance frequency and quality factor of a multi-layer CMOS-MEMS resonator designed for application as a mass sensitive gas sensor. The sensing principle is based on change in frequency or amplitude of the resonator due to adsorption/absorp...
متن کاملDesign and Simulation of a Fluidic Micro-Bio-Sensor Based on Resonator Array
In this paper, a fluidic biosensor with possibility to fabricate by Micro-Electro-Mechanical Systems (MEMS) technology is proposed for biomedical mass detection and lab-on-chip applications. This is designed by electromechanical coupling of harmonic micromechanical resonators with harmonic springers as a mechanical resonator array. It can disperse mechanical wave along the array by electrostati...
متن کاملStrongly Passively Damped MOEMS Vibration Sensor
Usually, one favors a low resonance peak for vibration sensing, since this expands the measurement range. Furthermore, one wants to avoid ringing. Both requirements are met by a high damping, i.e. a low quality factor of Q ~ 1. In this contribution, we show that it is possible to design a micro-opto-electro-mechanical system (MOEMS) vibration sensor featuring a strong passive damping leading to...
متن کاملStudying piezoelastic and piezomagnetoelastic configurations for different excitation frequencies in MEMS energy harvesters
Typically two configurations are used for energy harvesting with different advantages: piezoelastic and piezomagnetoelastic. Best performance of the piezoelastic configuration is when the excitation frequency is close to the resonance frequency. If the input frequency slightly deviates from the natural frequency, the generated power is severely decreased. To tackle the problem, the piezomagneto...
متن کامل